Invention Grant
- Patent Title: Adapter, connection device and supply system
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Application No.: US17388958Application Date: 2021-07-29
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Publication No.: US11776827B2Publication Date: 2023-10-03
- Inventor: Michael Braun , Simon Schutzbach , Kader Mekias , Dinesh Vijayaraghavan , Orazio Monteserrato
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE Garching
- Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee Address: DE Garching
- Agency: HAYES SOLOWAY P.C.
- Priority: NL 26157 2020.07.29
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05C11/10

Abstract:
An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.
Public/Granted literature
- US20220037168A1 ADAPTER, CONNECTION DEVICE AND SUPPLY SYSTEM Public/Granted day:2022-02-03
Information query
IPC分类: