Invention Grant
- Patent Title: Compensating misalignment of component carrier feature by modifying target design concerning correlated component carrier feature
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Application No.: US17247151Application Date: 2020-12-01
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Publication No.: US11778751B2Publication Date: 2023-10-03
- Inventor: Abderrazzaq Ifis , Markus Leitgeb
- Applicant: AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Applicant Address: AT Leoben
- Assignee: AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Current Assignee: AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Current Assignee Address: AT Leoben
- Agency: Smith Tempel Blaha LLC
- Agent Robert A. Blaha
- Priority: EP 213917 2019.12.05
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H05K3/30 ; G06T7/00 ; H05K3/46

Abstract:
A method of compensating misalignment during manufacturing laminate-type component carriers is disclosed. The method includes detecting an image of a region of interest of a component carrier structure during manufacturing the component carriers based on the component carrier structure, identifying a structural feature in the image of the region of interest showing misalignment with respect to a target design, and at least partially compensating the identified misalignment of the structural feature by modifying the target design of at least one correlated structural feature to be manufactured subsequently, wherein the at least one correlated structural feature is correlated to said structural feature showing misalignment.
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