Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17472902Application Date: 2021-09-13
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Publication No.: US11778808B2Publication Date: 2023-10-03
- Inventor: Teruhisa Sonohara , Shunichi Seno , Hiroki Tokuhira , Fumitaka Arai
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 21064476 2021.04.05
- Main IPC: G11C11/24
- IPC: G11C11/24 ; H10B12/00 ; H01L29/786 ; G11C11/4076 ; H01L29/66 ; G11C11/406 ; G11C11/4096 ; H01L21/02

Abstract:
A semiconductor memory device includes: a first wiring; a first semiconductor layer connected to the first wiring, the first semiconductor layer; a first electrode, the first electrode being connected to the first semiconductor layer; a second electrode disposed between the first electrode and the first wiring, the second electrode being opposed to the first semiconductor layer; a third electrode disposed between the second electrode and the first wiring, the third electrode; a second semiconductor layer disposed between the third electrode and the first semiconductor layer, the second semiconductor layer being opposed to the third electrode; and an electric charge accumulating layer electrically connected to the first wiring via the second semiconductor layer, the electric charge accumulating layer being opposed to the first semiconductor layer.
Public/Granted literature
- US20220328489A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-10-13
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