Invention Grant
- Patent Title: Modular filter manifold
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Application No.: US17232780Application Date: 2021-04-16
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Publication No.: US11779866B2Publication Date: 2023-10-10
- Inventor: Barry L. Gregerson
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: B01D35/30
- IPC: B01D35/30

Abstract:
A modular filter manifold includes one or more plates, each plate including connections for one or more filters on a first side, and connections for fluid lines on a second side opposite the first. At least two fluid line connections are provided for each filter connection, with a fluid passage through the plate for each fluid line connection. Each of the fluid passages are independent of one another. The manifold plates can be joined to a support structure to form a manifold to which filters can be attached. Piping can be connected to the fluid line connections to allow flow through the filters in series or parallel flow.
Public/Granted literature
- US20210331104A1 MODULAR FILTER MANIFOLD Public/Granted day:2021-10-28
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