- Patent Title: Polishing carrier head with multiple angular pressurizable zones
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Application No.: US17359410Application Date: 2021-06-25
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Publication No.: US11780049B2Publication Date: 2023-10-10
- Inventor: Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast , Vladimir Galburt
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B37/10 ; B24B37/005 ; B24B37/32

Abstract:
A carrier head for a polishing system includes a housing, a flexible membrane, a first plurality of pressure supply lines, a second plurality of pressure supply lines, and a valve assembly. The flexible membrane defines a multiplicity of independently pressurizable chambers. The valve assembly has a multiplicity of valves with each respective valve of the multiplicity of valves coupled to a respective pressure chamber from the multiplicity of independently pressurizable chambers. Each respective valve is configured to selectively couple the respective pressure chamber to one pressure supply line from a pair of pressure supply lines that include a pressure supply line from the first plurality of pressure supply lines and a pressure supply line from the second plurality of pressure supply lines.
Public/Granted literature
- US20210402558A1 POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES Public/Granted day:2021-12-30
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