Invention Grant
- Patent Title: Polishing pad and method for producing same
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Application No.: US16479824Application Date: 2018-01-18
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Publication No.: US11780057B2Publication Date: 2023-10-10
- Inventor: Joonsung Ryou , Tae Kyoung Kwon , Jang Won Seo , Sunghoon Yun
- Applicant: SK enpulse Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK ENPULSE CO., LTD.
- Current Assignee: SK ENPULSE CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T GROUP LLP
- Priority: KR 20170010401 2017.01.23
- International Application: PCT/KR2018/000850 2018.01.18
- International Announcement: WO2018/135878A 2018.07.26
- Date entered country: 2019-07-22
- Main IPC: B24D18/00
- IPC: B24D18/00 ; B24B37/20 ; B24B37/22

Abstract:
Disclosed is a method for producing a polishing pad, the method comprising the steps of: providing a polishing layer; forming a first through-hole penetrating the polishing layer; providing a support layer facing the polishing layer; interposing an adhesive layer between the polishing layer, which has the first through-hole, and support layer, and adhering the polishing layer and support layer to each other by means of the adhesive layer; forming, with the first through-hole as a reference point, a third through-hole penetrating the adhesive layer on a set area thereof, and a second through-hole penetrating the support layer on a set area thereof; and inserting a window inside the first through-hole.
Public/Granted literature
- US20210354267A1 POLISHING PAD AND METHOD FOR PRODUCING SAME Public/Granted day:2021-11-18
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