- Patent Title: Low-stress packaging structure for MEMS acceleration sensor chip
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Application No.: US17295598Application Date: 2021-01-12
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Publication No.: US11780727B2Publication Date: 2023-10-10
- Inventor: Lufeng Che
- Applicant: ZHEJIANG UNIVERSITY
- Applicant Address: CN Zhejiang
- Assignee: ZHEJIANG UNIVERSITY
- Current Assignee: ZHEJIANG UNIVERSITY
- Current Assignee Address: CN Zhejiang
- Agency: Hodgson Russ LLP
- Priority: CN 2011001239.2 2020.09.22
- International Application: PCT/CN2021/071306 2021.01.12
- International Announcement: WO2022/062279A 2022.03.31
- Date entered country: 2021-05-20
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01P1/02 ; B81B7/02 ; B81C1/00 ; G01P15/125

Abstract:
A low-stress packaging structure for a MEMS acceleration sensor chip includes a MEMS sensor chip and a chip carrier. Two sides of the bottom of the sensor chip are provided with a first metal layer and a second metal layer respectively. Two sides of a die attach area of the chip carrier are correspondingly provided with a third metal layer and a fourth metal layer. The first metal layer of the sensor chip and the third metal layer of the chip carrier are bonded together. The second metal layer of the sensor chip and the fourth metal layer of the chip carrier are only in contact but not bonded. A groove is arranged between the first metal layer and the second metal layer at the bottom of the sensor chip. A certain gap is defined between the sensor chip and cavity walls of chip carrier.
Public/Granted literature
- US20220306458A1 LOW-STRESS PACKAGING STRUCTURE FOR MEMS ACCELERATION SENSOR CHIP Public/Granted day:2022-09-29
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