Invention Grant
- Patent Title: Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern
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Application No.: US17152131Application Date: 2021-01-19
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Publication No.: US11780946B2Publication Date: 2023-10-10
- Inventor: Akiyoshi Yamazaki , Daisuke Kawana , Yoshitaka Komuro , Masatoshi Arai , Nobuhiro Michibayashi , Takatoshi Inari
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP 20008739 2020.01.22 JP 20008755 2020.01.22
- Main IPC: C08F220/58
- IPC: C08F220/58 ; G03F7/038 ; G03F7/039 ; C08F220/02 ; C08F220/12

Abstract:
An alternating copolymer including a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) represented by general formula (a0-2) in which Rp01 represents a hydrogen atom or the like; Vp01 represents a single bond or a divalent linking group; Rp02 and Rp03 each independently represents a hydrocarbon group which may have a substituent, or Rp02 and Rp03 are mutually bonded to form a ring; Rp04 represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; Rp05 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a cyano group or a hydroxy group; Rp06 represents a linear or branched aliphatic hydrocarbon group; and m represents an integer of 0 to 4
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