Invention Grant
- Patent Title: Plating apparatus and plating method
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Application No.: US17419036Application Date: 2018-12-28
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Publication No.: US11781235B2Publication Date: 2023-10-10
- Inventor: Yinuo Jin , Hongchao Yang , Jian Wang , Hui Wang
- Applicant: ACM Research (Shanghai) Inc.
- Applicant Address: CN Shanghai
- Assignee: ACM RESEARCH (SHANGHAI), INC.
- Current Assignee: ACM RESEARCH (SHANGHAI), INC.
- Current Assignee Address: CN Shanghai
- Agency: Osha Bergman Watanabe & Burton LLP
- International Application: PCT/CN2018/124649 2018.12.28
- International Announcement: WO2020/133149A 2020.07.02
- Date entered country: 2021-06-28
- Main IPC: C25D5/18
- IPC: C25D5/18 ; C25D7/12 ; C25D17/00 ; C25D21/12

Abstract:
A plating apparatus and plating methods for plating metal layers on a substrate. In an embodiment, a plating method comprises: step 1: immersing a substrate into plating solution of a plating chamber assembly including at least a first anode and a second anode (3001); step 2: turning on a first plating power supply applied on the first anode, setting the first plating power supply to output a power value P11 and continue with a period T11 (3002); step 3: when the period T11 ends, adjusting the first plating power supply applied on the first anode to output a power value P12 and continue with a period T12, at the same time, turning on a second plating power supply applied on the second anode, and setting the second plating power supply to output a power value P21 and continue with a period T21 (3003); and step 4: when the period T21 ends, adjusting the second plating power supply applied on the second anode to output a power value P22 and continue with a period T22; wherein step 2 to step 4 are performed periodically.
Public/Granted literature
- US20220081796A1 PLATING APPARATUS AND PLATING METHOD Public/Granted day:2022-03-17
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