Invention Grant
- Patent Title: Systems and methods for plate-up detection
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Application No.: US16859256Application Date: 2020-04-27
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Publication No.: US11781238B2Publication Date: 2023-10-10
- Inventor: Matthew Heller , David W. Bricker
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; H01L21/67 ; B08B13/00 ; H01L21/66 ; C25D21/12 ; B08B1/02 ; G01N21/47 ; G01N21/88 ; G01N21/94 ; C25D7/12
Abstract:
Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.
Public/Granted literature
- US20200370198A1 SYSTEMS AND METHODS FOR PLATE-UP DETECTION Public/Granted day:2020-11-26
Information query
