Electrostatic dissipative externally pressurized porous bearings
Abstract:
A non-contact air bearing having electrostatic discharge properties may comprise: a porous media element having a bearing surface; a supply line configured supply an externally pressurize gas or fluid to the porous media; and an electrostatic dissipative porous bearing layer on the bearing surface of the porous media element; wherein the externally pressurized fluid flows through the porous media element and creates a thin film between the electrostatic dissipative layer and a substrate supported by the air bearing.
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