Piezoelectric frequency-modulated gyroscope
Abstract:
A gyroscope includes a proof mass, and a first transduction/suspension structure coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction. A second transduction/suspension structure is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction. A third transduction/suspension structure is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction. A fourth transduction/suspension structure is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction/suspension structure comprises elongated beams. Piezoelectric transducers are deposited on some elongated beams, and are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.
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