Invention Grant
- Patent Title: Piezoelectric frequency-modulated gyroscope
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Application No.: US17529693Application Date: 2021-11-18
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Publication No.: US11781867B2Publication Date: 2023-10-10
- Inventor: Ville Kaajakari
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: SQUIRE PATTON BOGGS (US) LLP
- Priority: FI 206245 2020.12.03
- Main IPC: G01C19/5762
- IPC: G01C19/5762 ; G01C19/5649 ; G01C19/5656

Abstract:
A gyroscope includes a proof mass, and a first transduction/suspension structure coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction. A second transduction/suspension structure is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction. A third transduction/suspension structure is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction. A fourth transduction/suspension structure is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction/suspension structure comprises elongated beams. Piezoelectric transducers are deposited on some elongated beams, and are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.
Public/Granted literature
- US20220178696A1 PIEZOELECTRIC FREQUENCY-MODULATED GYROSCOPE Public/Granted day:2022-06-09
Information query
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