Invention Grant
- Patent Title: Spectroscopic measurement device
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Application No.: US17633881Application Date: 2019-08-28
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Publication No.: US11781978B2Publication Date: 2023-10-10
- Inventor: Keiko Kato , Hiroki Mashiko , Katsuya Oguri , Hideki Goto
- Applicant: Nippon Telegraph and Telephone Corporation
- Applicant Address: JP Tokyo
- Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- International Application: PCT/JP2019/033652 2019.08.28
- International Announcement: WO2021/038743A 2021.03.04
- Date entered country: 2022-02-08
- Main IPC: G01N21/3504
- IPC: G01N21/3504 ; G01J3/02 ; G01J3/42

Abstract:
A spectroscopic measurement apparatus includes a pulsed laser light source that emits pulsed laser light, a beam splitter that splits the pulsed laser light into pump light and probe light, a delay circuit that changes a delay time of the pump light with respect to the probe light, a chopper that intensity-modulates the pump light, a wavelength converter that wavelength-converts the probe light into vacuum ultraviolet light, an optical system that guides the pump light and the wavelength-converted probe light to a sample, and a detector that detects the probe light reflected by the sample.
Public/Granted literature
- US20220276158A1 Spectroscopic Measurement Device Public/Granted day:2022-09-01
Information query
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