Invention Grant
- Patent Title: Transport system and method
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Application No.: US17385018Application Date: 2021-07-26
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Publication No.: US11782428B2Publication Date: 2023-10-10
- Inventor: Wei-Pin Huang , Wen-Chi Chien , Yuh-Dean Tsai , Bing-Yuan Cheng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: G05B19/418
- IPC: G05B19/418

Abstract:
A transport system is provided. The transport system includes a stocker configured to store an assigned wafer carrier and having a gate port. The transport system also includes a semiconductor apparatus configured to transmit a request signal including a processed time according to a processing wafer carrier loaded on the semiconductor apparatus. The transport system further includes a vehicle configured to transport the assigned wafer carrier from the gate port to the semiconductor apparatus and a control system configured to control the vehicle. When the control system receives the request signal, the control system controls the stocker to transport the assigned wafer carrier inside of the stocker to the gate port at a start time, which is earlier than the processed time, and the control system controls the vehicle to transport the assigned wafer carrier from the gate port to the semiconductor apparatus.
Public/Granted literature
- US20210349451A1 TRANSPORT SYSTEM AND METHOD Public/Granted day:2021-11-11
Information query
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