Invention Grant
- Patent Title: Composite sintered body, electrostatic chuck member, and electrostatic chuck device
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Application No.: US16619921Application Date: 2018-06-28
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Publication No.: US11784079B2Publication Date: 2023-10-10
- Inventor: Nobuhiro Hidaka , Hironori Kugimoto
- Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Merchant & Gould P.C.
- Priority: JP 17127095 2017.06.29
- International Application: PCT/JP2018/024727 2018.06.28
- International Announcement: WO2019/004402A 2019.01.03
- Date entered country: 2019-12-05
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/117 ; H02N13/00
Abstract:
A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.
Public/Granted literature
- US20200211884A1 COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE Public/Granted day:2020-07-02
Information query
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