Invention Grant
- Patent Title: Vertical transport field-effect transistors having germanium channel surfaces
-
Application No.: US17539669Application Date: 2021-12-01
-
Publication No.: US11784096B2Publication Date: 2023-10-10
- Inventor: Choonghyun Lee , Pouya Hashemi , Takashi Ando
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- The original application number of the division: US15945121 2018.04.04
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/02 ; H01L21/225 ; H01L29/78 ; H01L29/66 ; H01L27/092 ; H01L29/10 ; H01L29/165 ; H01L29/04 ; H01L21/324

Abstract:
A method for fabricating a semiconductor device including vertical transport fin field-effect transistors (VTFETs) is provided. The method includes forming a bottom spacer on a first device region associated with a first VTFET and a second device region associated with a second VTFET, forming a liner on the bottom spacer, on a first fin structure including silicon germanium (SiGe) formed in the first device region and on a second fin structure including SiGe formed in the second device region, and forming crystalline Ge having a hexagonal structure from the SiGe by employing a Ge condensation process to orient a (111) direction of the crystalline Ge in a direction of charge flow for a VTFET.
Public/Granted literature
- US20220093473A1 VERTICAL TRANSPORT FIELD-EFFECT TRANSISTORS HAVING GERMANIUM CHANNEL SURFACES Public/Granted day:2022-03-24
Information query
IPC分类: