Invention Grant
- Patent Title: Method and system for driving piezoelectric MEMS-based active cooling devices
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Application No.: US16369821Application Date: 2019-03-29
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Publication No.: US11784109B2Publication Date: 2023-10-10
- Inventor: Suryaprakash Ganti , Seshagiri Rao Madhavapeddy
- Applicant: Frore Systems Inc.
- Applicant Address: US CA Los Altos
- Assignee: Frore Systems Inc.
- Current Assignee: Frore Systems Inc.
- Current Assignee Address: US CA San Jose
- Agency: Van Pelt, Yi & James LLP
- Main IPC: F25B21/02
- IPC: F25B21/02 ; H01L23/473 ; F04B53/10 ; F04B43/04 ; F04B45/047 ; B06B1/06 ; H01L23/427 ; H01L23/433 ; H05K7/20 ; F04D33/00 ; H04M1/02 ; F04B43/09 ; H01L23/46 ; H01L23/42 ; F04B17/00 ; F04B45/04 ; H10N30/00 ; H10N30/20 ; H10N30/80 ; H10N35/80
Abstract:
A cooling system and method for using the cooling system are described. The cooling system includes an array of cooling elements and a controller. The array of cooling elements corresponds to regions of the heat-generating structure where heat is generated in response to operation of the semiconductor. The controller is configured to activate portions of the array of cooling elements based on a determination that operation of the heat-generating structure is likely to generate heat in a given region of the heat-generating structure.
Public/Granted literature
- US20200049388A1 METHOD AND SYSTEM FOR DRIVING PIEZOELECTRIC MEMS-BASED ACTIVE COOLING DEVICES Public/Granted day:2020-02-13
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