Invention Grant
- Patent Title: Light emitting diode devices with defined hard mask opening
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Application No.: US18062870Application Date: 2022-12-07
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Publication No.: US11784286B2Publication Date: 2023-10-10
- Inventor: Erik William Young , Yu-Chen Shen , Chee Yin Foo , Yeow Meng Teo
- Applicant: Lumileds LLC
- Applicant Address: US CA San Jose
- Assignee: Lumileds LLC
- Current Assignee: Lumileds LLC
- Current Assignee Address: US CA San Jose
- Agency: Servilla Whitney LLC
- Main IPC: H01L33/20
- IPC: H01L33/20 ; H01L33/54 ; H01L33/00 ; H01L33/38

Abstract:
Described are light emitting diode (LED) devices comprising a plurality of mesas defining pixels, each of the mesas comprising semiconductor layers, an N-contact material in a space between each of the plurality of mesas, a dielectric material which insulates sidewalls of the P-type layer and the active region from the metal. A hard mask layer is above the semiconductor layers, the hard mask layer having a plurality of openings therein, each partially filled with a liner layer and partially filled with a P-metal material plug, the P-metal material plug having a width; and a passivation film is on the hard mask layer, the passivation film having a plurality of passivation film openings therein defining a width, the width of each passivation film opening being less than the width of a combination of the P-metal material plug and the liner layer.
Information query
IPC分类: