Invention Grant
- Patent Title: Two dimensional rod resonator for RF filtering
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Application No.: US17097289Application Date: 2020-11-13
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Publication No.: US11784623B2Publication Date: 2023-10-10
- Inventor: Cristian Cassella , Xuanyi Zhao
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Verrill Dana, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/04 ; H03H9/17 ; H03H9/56 ; H03H9/13

Abstract:
A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.
Public/Granted literature
- US20210152146A1 Two Dimensional Rod Resonator for RF Filtering Public/Granted day:2021-05-20
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