Invention Grant
- Patent Title: Differential resonator and MEMS sensor
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Application No.: US16986306Application Date: 2020-08-06
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Publication No.: US11784624B2Publication Date: 2023-10-10
- Inventor: Zhan Zhan , Yang Li , Yuwei Liu , Qiuyu Tan , Rui Zhang
- Applicant: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Current Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Agency: W&G Law Group
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/09

Abstract:
The present disclosure provides a differential resonator and a MEMS sensor. The differential resonator includes a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator, and the first resonator and the second resonator are movably connected with the substrate. The coupling mechanism includes a first guide beam, a second guide beam, a first coupling beam, a second coupling beam, a first connecting piece and a second connecting piece. The first guide beam and the second guide beam are arranged on two opposite sides of a direction perpendicular to a vibration direction of the first resonator or the second resonator. The first coupling beam is connected with the first guide beam, the second guide beam and the first resonator. The second coupling beam is connected with the first guide beam, the second guide beam and the second resonator.
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