Invention Grant
- Patent Title: Three-dimensional memory device with source structure and methods for forming the same
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Application No.: US17528095Application Date: 2021-11-16
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Publication No.: US11785772B2Publication Date: 2023-10-10
- Inventor: Wenxiang Xu , Wei Xu , Pan Huang , Ping Yan , Zongliang Huo , Wenbin Zhou , Ji Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H10B43/10
- IPC: H10B43/10 ; H01L21/02 ; H01L21/311 ; H01L21/768 ; H10B43/27

Abstract:
Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack having interleaved a plurality of conductor layers and a plurality of insulating layers, a plurality of channel structures extending in the memory stack, and a source structure extending in the memory stack. The source structure includes a plurality of source contacts each in a respective insulating structure. Two adjacent source contacts are conductively connected to one another by a connection layer, the connection layer includes a pair of first portions being over the two adjacent ones of the plurality of source contacts and a second portion between the pair of first portions. A support structure is between the two adjacent source contacts. The support structure includes a cut structure over interleaved a plurality of conductor portions and a plurality of insulating portions.
Public/Granted literature
- US20220077171A1 THREE-DIMENSIONAL MEMORY DEVICE WITH SOURCE STRUCTURE AND METHODS FOR FORMING THE SAME Public/Granted day:2022-03-10
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