Invention Grant
- Patent Title: FeRAM MFM structure with selective electrode etch
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Application No.: US17574010Application Date: 2022-01-12
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Publication No.: US11785777B2Publication Date: 2023-10-10
- Inventor: Chih-Hsiang Chang , Kuo-Chi Tu , Sheng-Hung Shih , Wen-Ting Chu , Tzu-Yu Chen , Fu-Chen Chang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16394207 2019.04.25
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H10B51/00 ; G11C11/22 ; H01L29/78 ; H01L29/51 ; H01L29/66 ; H01L21/28

Abstract:
In some embodiments, the present disclosure relates to a method of forming an integrated chip including forming a ferroelectric layer over a bottom electrode layer, forming a top electrode layer over the ferroelectric layer, performing a first removal process to remove peripheral portions of the bottom electrode layer, the ferroelectric layer, and the top electrode layer, and performing a second removal process using a second etch that is selective to the bottom electrode layer and the top electrode layer to remove portions of the bottom electrode layer and the top electrode layer, so that after the second removal process the ferroelectric layer has a surface that protrudes past a surface of the bottom electrode layer and the top electrode layer.
Public/Granted literature
- US20220139959A1 FeRAM MFM STRUCTURE WITH SELECTIVE ELECTRODE ETCH Public/Granted day:2022-05-05
Information query
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