Invention Grant
- Patent Title: Trench formation scheme for programmable metallization cell to prevent metal redeposit
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Application No.: US17748601Application Date: 2022-05-19
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Publication No.: US11785786B2Publication Date: 2023-10-10
- Inventor: Fu-Ting Sung , Chung-Chiang Min , Yuan-Tai Tseng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16408898 2019.05.10
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H10B63/00 ; G11C5/06 ; G11C13/00 ; H10N70/20 ; H10N70/00

Abstract:
Some embodiments relate to a method for forming a memory device. The method includes forming a lower dielectric layer over a conductive wire. A stack of memory layers is formed within the lower dielectric layer and over the conductive wire. The stack of memory layers comprises a top electrode, a bottom electrode, and a data storage layer between the top electrode and the bottom electrode. A removal process is performed on the stack of memory layers to define a programmable metallization cell that comprises the top electrode, the bottom electrode, and the data storage layer. The programmable metallization cell comprises a central region and a peripheral region that extends upwardly from the central region. A top surface of the programmable metallization cell and a top surface of the lower dielectric layer are coplanar.
Public/Granted literature
- US20220278170A1 TRENCH FORMATION SCHEME FOR PROGRAMMABLE METALLIZATION CELL TO PREVENT METAL REDEPOSIT Public/Granted day:2022-09-01
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