- Patent Title: Real-time isolation of self-test and linear acceleration signals
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Application No.: US17695077Application Date: 2022-03-15
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Publication No.: US11789036B2Publication Date: 2023-10-17
- Inventor: Kevin Hughes , Giacomo Laghi , Vito Avantaggiati
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Van Hoven PC
- Agent Joshua Van Hoven
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125 ; G01P15/08

Abstract:
A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.
Public/Granted literature
- US20220229086A1 REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS Public/Granted day:2022-07-21
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