Electronic device processing systems including an equipment front end module (EFEM) with at least one side storage pod are described. The side storage pod has a chamber including a storage container. The storage container includes at least a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. A gas flow component is configured to provide a gas flow between the EFEM body and the storage container. A gas flow temperature component is configured to modify the temperature of the gas flow to a particular temperature.