Invention Grant
- Patent Title: Die bonding system with wafer lift and level assembly
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Application No.: US17782520Application Date: 2021-08-20
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Publication No.: US11791197B2Publication Date: 2023-10-17
- Inventor: Nicholas Samuel Celia, Jr. , Cyriac Devasia
- Applicant: MRSI Systems LLC
- Applicant Address: US MA Tewksbury
- Assignee: MRSI Systems LLC
- Current Assignee: MRSI Systems LLC
- Current Assignee Address: US MA Tewksbury
- Agency: Maine Cernota & Rardin
- International Application: PCT/US2021/047004 2021.08.20
- International Announcement: WO2023/022736A 2023.02.23
- Date entered country: 2022-06-03
- Main IPC: H01L21/687
- IPC: H01L21/687

Abstract:
A die bonding system comprising a wafer lift and level assembly configured to allow rapid planarization of a wafer comprising a wafer frame configured to retain a wafer and be slidably retained within guide clevises and a leveling pedestal configured to support a wafer from below in a localized area where a die bonding operation is to take place, allowing the quick and repeatable planarization of die(s) to the wafer without the need for distinct planarization procedures that would slow cycle times and decrease production.
Public/Granted literature
- US20230148356A1 DIE BONDING SYSTEM WITH WAFER LIFT AND LEVEL ASSEMBLY Public/Granted day:2023-05-11
Information query
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