Invention Grant
- Patent Title: Systems for reverse pulsing
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Application No.: US15701176Application Date: 2017-09-11
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Publication No.: US11798785B2Publication Date: 2023-10-24
- Inventor: Maolin Long , Zhongkui Tan , Ying Wu , Qian Fu , Alex Paterson , John Drewery
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: PENILLA IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H01L21/3065

Abstract:
Systems and methods for reverse pulsing are described. One of the systems includes a controller, first and second source radio frequency (RF) generators, and first and second bias RF generators. The controller controls the first source RF generator to generate a first source pulsed signal, and controls the second source RF generator to generate a second source pulsed signal. The system includes a first match circuit that receives the first and second source pulsed signals and combines the first and second source pulsed signals. The controller controls the first bias RF generator to generate a first bias pulsed signal, and controls the second bias RF generator to generate a second bias pulsed signal. The system includes a second match circuit that receives the first and second bias pulsed signals and combines the first and second bias pulsed signals into a combined bias signal.
Public/Granted literature
- US20170372912A1 Systems and Methods for Reverse Pulsing Public/Granted day:2017-12-28
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