Invention Grant
- Patent Title: Substrate support and plasma processing apparatus
-
Application No.: US16677902Application Date: 2019-11-08
-
Publication No.: US11798791B2Publication Date: 2023-10-24
- Inventor: Yasuharu Sasaki , Shingo Koiwa
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: WEIHROUCH IP
- Priority: JP 18210734 2018.11.08
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/683

Abstract:
A substrate support for a plasma processing apparatus includes a first support area configured to support a substrate placed thereon; and a second support area configured to support a focus ring placed thereon. The second support area includes a lower electrode, a chuck area, and a bonding area. The chuck area includes a first electrode and a second electrode, and is configured to hold the focus ring by a potential difference set between the first electrode and the second electrode. The first electrode and the second electrode extend in the circumferential direction, and the first electrode is provided inward in the radial direction with respect to the second electrode. The substrate support further includes a first conducting wire and a second conducting wire each extending around a center or on the center between an inner boundary and an outer boundary of the second support area.
Public/Granted literature
- US20200152429A1 SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS Public/Granted day:2020-05-14
Information query