Invention Grant
- Patent Title: Chip packaging structure and method for preparing same
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Application No.: US17548145Application Date: 2021-12-10
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Publication No.: US11798888B2Publication Date: 2023-10-24
- Inventor: Yayuan Xue , Xingtao Xue , Chengchung Lin
- Applicant: SJ Semiconductor (Jiangyin) Corporation
- Applicant Address: CN Jiangyin
- Assignee: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
- Current Assignee: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
- Current Assignee Address: CN Jiangyin
- Agency: Alston & Bird LLP
- Priority: CN 2011458682.2 2020.12.11 CN 2022971251.8 2020.12.11
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L23/00

Abstract:
A chip packaging structure and a method for preparing the same are disclosed. The method includes: providing a wafer having a first surface and a second surface, forming a first redistribution layer on the first surface, wherein the wafer includes TSVs having first ends exposed from the wafer; forming welding pads electrically connected to the TSVs through the first redistribution layer; forming a trimming groove in an edge area of the wafer; bonding the first surface of the wafer to a first supporting substrate, and thinning the second surface of the wafer to expose the second ends of the TSVs; forming, on the second surface of the wafer, solder balls electrically connected to the TSVs through a second redistribution layer; bonding the second surface of the wafer to a second supporting substrate, and peeling off the first supporting substrate; and connecting the welding pads to a semiconductor chip.
Public/Granted literature
- US20220189878A1 CHIP PACKAGING STRUCTURE AND METHOD FOR PREPARING SAME Public/Granted day:2022-06-16
Information query
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