• Patent Title: Apparatus for and method of optical component alignment
  • Application No.: US18020718
    Application Date: 2021-08-10
  • Publication No.: US11799261B2
    Publication Date: 2023-10-24
  • Inventor: Hong Ye
  • Applicant: Cymer, LLC
  • Applicant Address: US CA San Diego
  • Assignee: Cymer, LLC
  • Current Assignee: Cymer, LLC
  • Current Assignee Address: US CA San Diego
  • Agency: DiBerardino McGovern IP Group LLC
  • International Application: PCT/US2021/045324 2021.08.10
  • International Announcement: WO2022/046402A 2022.03.03
  • Date entered country: 2023-02-10
  • Main IPC: H01S3/00
  • IPC: H01S3/00 G02B5/20 G03F7/00 G03F7/20
Apparatus for and method of optical component alignment
Abstract:
Apparatus for and method of aligning optical components such as mirrors to facilitate proper beam alignment using an image integration optical system is used to integrate images from multiple optical features such as from both left mirror bank and right mirror bank to present the images simultaneously to the camera system. A fluorescent material may be used to render a beam footprint visible and the relative positions of the footprint and an alignment feature may be used to align the optical feature.
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