Invention Grant
- Patent Title: Wideband piezoelectric vibratory MEMS harvester
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Application No.: US17051307Application Date: 2019-05-03
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Publication No.: US11799398B2Publication Date: 2023-10-24
- Inventor: Lihong Zhang , Seyedfakhreddin Nabavi
- Applicant: Memorial University of Newfoundland
- Applicant Address: CA St. John's
- Assignee: Memorial University of Newfoundland
- Current Assignee: Memorial University of Newfoundland
- Current Assignee Address: CA St. John's
- Agency: BERESKIN & PARR LLP/S.E.N.C.R.L. s.r.l
- Agent Tonino Rosario Orsi
- International Application: PCT/CA2019/050588 2019.05.03
- International Announcement: WO2019/210425A 2019.11.07
- Date entered country: 2020-10-28
- Main IPC: H02N2/18
- IPC: H02N2/18 ; H02N2/00 ; H10N30/06 ; H10N30/076 ; H10N30/082 ; H10N30/30 ; H10N30/853 ; H10N30/87

Abstract:
Several types of piezoelectric MEMS vibration energy harvesters are described herein as well as methods of fabricating the vibration energy harvesters. The vibration energy harvesters generally comprise a serpentine structure having a central longitudinal axis; a piezoelectric film deposited on a surface of the serpentine structure; a central mass located at a mid-portion of the central longitudinal axis; two lateral masses positioned at opposing corners of the serpentine structure; anchor points at two other opposing corners of the serpentine structure; and upper and lower electrode layers. The energy harvesters have a 180 degree rotational symmetry about the central mass and when the serpentine structure experiences a strain, the piezoelectric film generates a voltage. The geometry of the energy harvesters allows for lower frequency and wider bandwidth operation as well as higher power density.
Public/Granted literature
- US20210135601A1 WIDEBAND PIEZOELECTRIC VIBRATORY MEMS HARVESTER Public/Granted day:2021-05-06
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