Invention Grant
- Patent Title: Digitally tunable acoustic wave resonators
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Application No.: US17173919Application Date: 2021-02-11
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Publication No.: US11799448B2Publication Date: 2023-10-24
- Inventor: Roozbeh Tabrizian
- Applicant: University of Florida Research Foundation, Incorporated
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee Address: US FL Gainesville
- Agency: ALSTON & BIRD LLP
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H3/02 ; H03H9/02 ; H03H9/13

Abstract:
A digitally tunable acoustic wave resonator includes, in part, a first electrode positioned above a substrate, a composite stack positioned above the first electrode, and a second electrode positioned above the composite stack. The composite stack may include one or more alternate layers of a ferroelectric layer and a transition-metal nitride layer. The transition-metal nitride layer can be positioned above the ferroelectric layer, except the ferroelectric layer at the top of the composite stack. The ferroelectric layer comprises an aluminum scandium nitride layer Al1-xScxN, where 0
Public/Granted literature
- US20210257987A1 Digitally Tunable Acoustic Wave Resonators Public/Granted day:2021-08-19
Information query
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