Invention Grant
- Patent Title: Piezoelectric stack, piezoelectric element, and method of manufacturing piezoelectric stack
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Application No.: US16942813Application Date: 2020-07-30
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Publication No.: US11800808B2Publication Date: 2023-10-24
- Inventor: Kenji Shibata , Kazutoshi Watanabe , Toshiaki Kuroda
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 19143327 2019.08.02
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/27 ; H01L41/08 ; H01L41/314 ; H10N30/853 ; H10N30/05 ; H10N30/074 ; H10N30/00
Abstract:
There is provided a piezoelectric stack, including: a substrate; an electrode film; and a piezoelectric film which is comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
Public/Granted literature
- US20210036213A1 PIEZOELECTRIC STACK, PIEZOELECTRIC ELEMENT, AND METHOD OF MANUFACTURING PIEZOELECTRIC STACK Public/Granted day:2021-02-04
Information query
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