Invention Grant
- Patent Title: Load-lock gauge
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Application No.: US17154698Application Date: 2021-01-21
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Publication No.: US11802806B2Publication Date: 2023-10-31
- Inventor: Gerardo A. Brucker
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L27/00
- IPC: G01L27/00 ; G01L13/02 ; G01L9/12 ; G01L21/12 ; G01L9/00 ; B81B3/00

Abstract:
A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
Public/Granted literature
- US20220228939A1 Load-Lock Gauge Public/Granted day:2022-07-21
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