Invention Grant
- Patent Title: Graphene-enabled block copolymer lithography transfer to arbitrary surfaces
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Application No.: US17115572Application Date: 2020-12-08
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Publication No.: US11803120B2Publication Date: 2023-10-31
- Inventor: Keith E. Whitener , Woo K. Lee
- Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
- Applicant Address: US VA Arlington
- Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US VA Arlington
- Agency: US Naval Research Laboratory
- Agent Stephen T. Hunnius
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/34 ; C08J7/14 ; B29C71/02 ; C01B32/194

Abstract:
A method of graphene-enabled block copolymer lithography transfer to an arbitrary substrate comprising the steps of applying graphene on a surface, adding block copolymers to the graphene on the surface, phase-separating the block copolymers, forming nanopatterned phase separated block copolymers, delaminating the graphene, and transferring the graphene and nanopatterned phase separated block copolymers to a second surface. A layer of nanopatterned phase separated block copolymers on an arbitrary surface comprising a first arbitrary substrate absent of chemical preparation, a layer of graphene on the first arbitrary substrate, and a layer of phase-separated block copolymers on the layer of graphene, wherein the layer of phase-separated block copolymers on the layer of graphene was formed on a second substrate and delaminated via water liftoff and wherein the nanopatterned phase separated block copolymers are utilized as a shadow mask for lithography on the first arbitrary substrate.
Public/Granted literature
- US20210208501A1 Graphene-enabled Block Copolymer Lithography Transfer to Arbitrary Surfaces Public/Granted day:2021-07-08
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