Invention Grant
- Patent Title: CMOS wavefront sensors
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Application No.: US17006116Application Date: 2020-08-28
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Publication No.: US11804505B2Publication Date: 2023-10-31
- Inventor: Matthias Krojer
- Applicant: Matthias Krojer
- Applicant Address: DE Ilmenau
- Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Current Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Current Assignee Address: DE Erfurt
- Agency: Thompson Hine LLP
- Priority: GB 12344 2019.08.28
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A Complementary Metal Oxide Semiconductor (CMOS) wavefront sensor including a sensor element having an array of photodiodes and a passivation layer covering the sensor element. The sensor further includes a binary lens formed in the passivation layer and arranged to focus incident light onto the sensor element.
Public/Granted literature
- US20210066376A1 CMOS WAVEFRONT SENSORS Public/Granted day:2021-03-04
Information query
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