Invention Grant
- Patent Title: Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
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Application No.: US17319196Application Date: 2021-05-13
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Publication No.: US11808353B2Publication Date: 2023-11-07
- Inventor: Stephen Carson
- Applicant: Ichor Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Ichor Systems, Inc.
- Current Assignee: Ichor Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: The Belles Group, P.C.
- Main IPC: F16J15/06
- IPC: F16J15/06 ; F16J15/10 ; H01L21/67

Abstract:
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal insertion tools may be used to facilitate installation of the seals to permit efficient assembly of fluid flow components into apparatus for controlling flow.
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Information query
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