Invention Grant
- Patent Title: Pressure sensing device with cavity and related methods
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Application No.: US17063147Application Date: 2020-10-05
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Publication No.: US11808650B2Publication Date: 2023-11-07
- Inventor: Alberto Pagani , Federico Giovanni Ziglioli , Bruno Murari
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Slater Matsil, LLP
- The original application number of the division: US15914832 2018.03.07
- Main IPC: G01L5/00
- IPC: G01L5/00 ; G01L1/18 ; G01L1/20 ; F16B31/02 ; G01L5/24
Abstract:
A pressure sensing device may include a body configured to distribute a load applied between first and second parts positioned one against the other, and a pressure sensor carried by the body. The pressure sensor may include a support body, and an IC die mounted with the support body and defining a cavity. The IC die may include pressure sensing circuitry responsive to bending associated with the cavity, and an IC interface coupled to the pressure sensing circuitry.
Public/Granted literature
- US20210018389A1 PRESSURE SENSING DEVICE WITH CAVITY AND RELATED METHODS Public/Granted day:2021-01-21
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