X-ray analyzer and X-ray analysis method
Abstract:
An X-ray analyzer has a configuration including an X-ray source, an X-ray detector configured to detect an X-ray irradiated from the X-ray source, a rotary stage (stage) disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target, and a light irradiation mechanism configured to irradiate light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow of the imaging target onto a position of the X-ray detector.
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