Invention Grant
- Patent Title: X-ray analysis apparatus
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Application No.: US17588908Application Date: 2022-01-31
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Publication No.: US11808721B2Publication Date: 2023-11-07
- Inventor: Takeshi Osakabe
- Applicant: Rigaku Corporation
- Applicant Address: JP Akishima
- Assignee: RIGAKU CORPORATION
- Current Assignee: RIGAKU CORPORATION
- Current Assignee Address: JP Akishima
- Agency: CANTOR COLBURN LLP
- Priority: JP 21013009 2021.01.29
- Main IPC: G01N23/20016
- IPC: G01N23/20016 ; G01N23/20025

Abstract:
Provided is an X-ray analysis apparatus including: a goniometer; a sample stage provided at a rotation center of the goniometer; an X-ray source configured to irradiate a sample with an X-ray, the sample being fixed on the sample stage; an X-ray detector configured to detect the X-ray diffracted by the sample; and an opening/closing mechanism configured to vary a width of a slit, which is formed between a pair of shielding members, by opening/closing the pair of shielding members, the opening/closing mechanism including an asymmetric control unit configured to control aperture widths of the pair of shielding members asymmetrically for one of the pair of shielding members on one side and another one of the pair of shielding members on another side depending on a rotation angle of the goniometer.
Public/Granted literature
- US20220244199A1 X-RAY ANALYSIS APPARATUS Public/Granted day:2022-08-04
Information query
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