Invention Grant
- Patent Title: Testing a single chip in a wafer probing system
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Application No.: US17643216Application Date: 2021-12-08
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Publication No.: US11808808B2Publication Date: 2023-11-07
- Inventor: Thomas Gentner , Alejandro Alberto Cook Lobo , Otto Andreas Torreiter
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Daniel J. Hakimi
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A method for testing at least one single chip in a wafer probing system, at least comprising: providing an adapter plate having an interface surface for contacting a vacuum chuck of the wafer probing system, the adapter plate being configured to accommodate the at least one single chip in a cutout with a chip rear surface being flush with the interface surface; loading the adapter plate with the at least one single chip into the wafer probing system; determining an exact position of the at least one single chip in the adapter plate in the search area; and testing the at least one single chip with test routines stored in a controller of the wafer probing system. A device and an adapter plate for testing at least one single chip in a wafer probing system.
Public/Granted literature
- US20230176116A1 TESTING A SINGLE CHIP IN A WAFER PROBING SYSTEM Public/Granted day:2023-06-08
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