Invention Grant
- Patent Title: Method for producing a microoptoelectromechanical component, and corresponding microoptoelectromechanical component
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Application No.: US17911463Application Date: 2021-06-17
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Publication No.: US11808989B2Publication Date: 2023-11-07
- Inventor: Rafel Ferré i Tomàs
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard Messina
- Priority: DE 2020209122.6 2020.07.21
- International Application: PCT/EP2021/066402 2021.06.17
- International Announcement: WO2022/017694A 2022.01.27
- Date entered country: 2022-09-14
- Main IPC: G02B6/35
- IPC: G02B6/35 ; G02F1/295

Abstract:
A method for producing a microoptoelectromechanical component and a corresponding microoptoelectromechanical component. The microoptoelectromechanical component is equipped with a base substrate comprising a cavity which is formed therein and is closed by a covering substrate, an optical waveguide on the covering substrate above the cavity, which optical waveguide comprises a sheathed waveguide core, an electrical contact element in the region of the surrounding covering substrate, wherein a contact pad formed by an electrically conductive polysilicon layer is arranged underneath the electrical contact element, wherein the optical waveguide and the covering substrate located thereunder are divided into a stationary portion and a deflectable portion, which can be docked to the stationary portion by electrically deflecting the corresponding portion of the covering wafer.
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