• Patent Title: Method for producing a microoptoelectromechanical component, and corresponding microoptoelectromechanical component
  • Application No.: US17911463
    Application Date: 2021-06-17
  • Publication No.: US11808989B2
    Publication Date: 2023-11-07
  • Inventor: Rafel Ferré i Tomàs
  • Applicant: Robert Bosch GmbH
  • Applicant Address: DE Stuttgart
  • Assignee: ROBERT BOSCH GMBH
  • Current Assignee: ROBERT BOSCH GMBH
  • Current Assignee Address: DE Stuttgart
  • Agency: NORTON ROSE FULBRIGHT US LLP
  • Agent Gerard Messina
  • Priority: DE 2020209122.6 2020.07.21
  • International Application: PCT/EP2021/066402 2021.06.17
  • International Announcement: WO2022/017694A 2022.01.27
  • Date entered country: 2022-09-14
  • Main IPC: G02B6/35
  • IPC: G02B6/35 G02F1/295
Method for producing a microoptoelectromechanical component, and corresponding microoptoelectromechanical component
Abstract:
A method for producing a microoptoelectromechanical component and a corresponding microoptoelectromechanical component. The microoptoelectromechanical component is equipped with a base substrate comprising a cavity which is formed therein and is closed by a covering substrate, an optical waveguide on the covering substrate above the cavity, which optical waveguide comprises a sheathed waveguide core, an electrical contact element in the region of the surrounding covering substrate, wherein a contact pad formed by an electrically conductive polysilicon layer is arranged underneath the electrical contact element, wherein the optical waveguide and the covering substrate located thereunder are divided into a stationary portion and a deflectable portion, which can be docked to the stationary portion by electrically deflecting the corresponding portion of the covering wafer.
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