Invention Grant
- Patent Title: Process manufacturing method, method for adjusting threshold voltage device, and storage medium
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Application No.: US17198462Application Date: 2021-03-11
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Publication No.: US11809802B2Publication Date: 2023-11-07
- Inventor: Abraham Yoo , Ying Jin , Jisong Jin
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Crowell & Moring, LLP
- Priority: CN 2010245619.4 2020.03.31
- Main IPC: G06F30/398
- IPC: G06F30/398 ; H01L21/321 ; H01L29/40 ; G06F119/08 ; G06F119/18

Abstract:
A process manufacturing method, a method for adjusting a threshold voltage, a device, and a storage medium are provided. One form of a process manufacturing method includes: determining a type of to-be-formed MOS device and a corresponding threshold voltage interval; obtaining, according to a MOS device type and the corresponding threshold voltage interval, a corresponding threshold voltage adjustment process by querying a pre-configured first mapping relationship of the threshold voltage interval and a second mapping relationship of the threshold voltage interval; and establishing a process flow according to the corresponding threshold voltage adjustment process, the first mapping relationship being a mapping relationship between the threshold voltage interval and the MOS device type; and the second mapping relationship being a correspondence between the threshold voltage interval in the first mapping relationship and a threshold voltage adjustment process formed by at least one adjustment process selected from a preset process flow, the threshold voltage adjustment process causing a threshold voltage to be in the corresponding threshold voltage interval under the action of a total threshold voltage offset. According to the present disclosure, the difficulty in adjusting the threshold voltage is reduced.
Public/Granted literature
- US20210303768A1 PROCESS MANUFACTURING METHOD, METHOD FOR ADJUSTING THRESHOLD VOLTAGE DEVICE, AND STORAGE MEDIUM Public/Granted day:2021-09-30
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