Invention Grant
- Patent Title: Method and related apparatus for integrating electronic memory in an integrated chip
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Application No.: US17341676Application Date: 2021-06-08
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Publication No.: US11817488B2Publication Date: 2023-11-14
- Inventor: Tung Ying Lee , Shao-Ming Yu , Tzu-Chung Wang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16394152 2019.04.25
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L29/51 ; H01L21/28 ; H01L29/66 ; H10B61/00

Abstract:
In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.
Public/Granted literature
- US20210296461A1 METHOD AND RELATED APPARATUS FOR INTEGRATING ELECTRONIC MEMORY IN AN INTEGRATED CHIP Public/Granted day:2021-09-23
Information query
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