• Patent Title: Vibration component measurement device, Kelvin probe force microscope, and vibration component measurement method
  • Application No.: US17911572
    Application Date: 2021-03-25
  • Publication No.: US11835548B2
    Publication Date: 2023-12-05
  • Inventor: Yasuhiro Sugawara
  • Applicant: OSAKA UNIVERSITY
  • Applicant Address: JP Osaka
  • Assignee: OSAKA UNIVERSITY
  • Current Assignee: OSAKA UNIVERSITY
  • Current Assignee Address: JP Osaka
  • Agency: Casimir Jones, SC
  • Agent Robert A. Goetz
  • Priority: JP 20056446 2020.03.26
  • International Application: PCT/JP2021/012464 2021.03.25
  • International Announcement: WO2021/193799A 2021.09.30
  • Date entered country: 2022-09-14
  • Main IPC: G01Q60/30
  • IPC: G01Q60/30 G01Q60/32 G01Q30/20
Vibration component measurement device, Kelvin probe force microscope, and vibration component measurement method
Abstract:
In order to increase the order of a frequency of an AC signal to be applied between a vibration section and a sample to an order at substantially the same level as the order of a vibration frequency of the vibration section in measuring a vibration component of the vibration control section, a vibration component measuring device (2) includes: a vibration section (4); a first AC signal generator (20) configured to generate a first AC signal; a second AC signal generator (44) configured to generate a second AC signal having a frequency which is (a) more than one time and less than two times or (b) more than two times and less than three times as high as a frequency of the first AC signal; a signal applying section (14, 56) configured to apply the second AC signal between the vibration section and a sample (X); a vibration control section (10) configured to cause the vibration section to vibrate; and a measuring section (16, 18, 20, 22, 42, 44, 50) configured to measure a varying component of vibration of the vibration section, the varying component being varied by an interaction between the vibration section and the sample.
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