Invention Grant
- Patent Title: PIC die with optical deflector for ambient light
-
Application No.: US17450324Application Date: 2021-10-08
-
Publication No.: US11837547B2Publication Date: 2023-12-05
- Inventor: Roderick Alan Augur , Yusheng Bian , Robert John Fox, III
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/552 ; H01L23/522

Abstract:
A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.
Public/Granted literature
- US20230113261A1 PIC DIE WITH OPTICAL DEFLECTOR FOR AMBIENT LIGHT Public/Granted day:2023-04-13
Information query
IPC分类: