Invention Grant
- Patent Title: Method for manufacturing panel using a glass substrate as the laser light transmitting member and laser processing apparatus
-
Application No.: US17259166Application Date: 2019-06-19
-
Publication No.: US11842898B2Publication Date: 2023-12-12
- Inventor: Suk-Hwan Chung , Masashi Machida
- Applicant: JSW AKTINA SYSTEM CO., LTD.
- Applicant Address: JP Yokohama
- Assignee: JSW AKTINA SYSTEM CO., LTD
- Current Assignee: JSW AKTINA SYSTEM CO., LTD
- Current Assignee Address: JP Yokohama
- Agency: Potomac Law Group, PLLC
- Priority: JP 18130422 2018.07.10
- International Application: PCT/JP2019/024360 2019.06.19
- International Announcement: WO2020/012903A 2020.01.16
- Date entered country: 2021-01-09
- Main IPC: H01L21/268
- IPC: H01L21/268 ; B23K26/08 ; H01L21/02 ; H01L21/20 ; B23K101/40 ; B23K26/03 ; B23K26/0622 ; B23K26/12 ; B23K26/352 ; B23K26/00
Abstract:
Quality of a crystalline film is improved. In a method for manufacturing a panel, a polysilicon film is formed by emission of laser light to an amorphous silicon film 3A through a light-transmittable member 4 that can transmit the laser light.
Public/Granted literature
- US20210159079A1 METHOD FOR MANUFACTURING PANEL AND LASER PROCESSING APPARATUS Public/Granted day:2021-05-27
Information query
IPC分类:
