- Patent Title: Hard carbon film, manufacturing method for same, and sliding member
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Application No.: US16612411Application Date: 2018-05-09
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Publication No.: US11851741B2Publication Date: 2023-12-26
- Inventor: Takehiko Ooshiro , Yukako Fukutani , Koji Miyake
- Applicant: NIPPON ITF, INC.
- Applicant Address: JP Kyoto
- Assignee: NIPPON ITF, INC.
- Current Assignee: NIPPON ITF, INC.
- Current Assignee Address: JP Kyoto
- Agency: JCIPRNET
- Priority: JP 17094588 2017.05.11
- International Application: PCT/JP2018/017862 2018.05.09
- International Announcement: WO2018/207803A 2018.11.15
- Date entered country: 2019-11-11
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C14/24 ; C23C14/32 ; C23C16/26 ; F16C33/10

Abstract:
A hard carbon film that forms a sliding surface of a sliding member, wherein the hard carbon film includes terminal atoms that bond to carbon atoms and has a plurality of protruding shaped parts, part of which protrude from the surface thereof, with the periphery of each of the plurality of protruding shaped parts being terminated by a terminal atom. A manufacturing method for the hard carbon film for producing the hard carbon film on a sliding surface of the sliding member using arc vapor deposition having graphite as the vaporization source, wherein a gas containing the terminal atoms that bond to carbon atoms is introduced, and the plurality of protruding shaped parts is grown on the surface of the hard carbon film while terminating the periphery of the plurality of protruding shaped parts by bonding of the terminal atoms to carbon atoms.
Public/Granted literature
- US20210156021A1 HARD CARBON FILM, MANUFACTURING METHOD FOR SAME, AND SLIDING MEMBER Public/Granted day:2021-05-27
Information query
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