Time delay valve and flow rate controller
Abstract:
A time delay valve includes a switching valve that switches between a first position and a second position; an urging member that urges the switching valve toward the first position; a driving mechanism that urges the switching valve toward the second position located opposite the first position in the presence of the pressure of a pilot fluid being supplied; a pilot flow channel that introduces the pilot fluid to the driving mechanism; and a delaying mechanism that delays the switching timing of the switching valve. The delaying mechanism includes a first throttle valve provided on the pilot flow channel, a compensation mechanism that urges the switching valve toward the first position in the presence of the pressure of the pilot fluid being supplied, and a compensation flow channel that is branched from the pilot flow channel to introduce a portion of the pilot fluid to the compensation mechanism.
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