Invention Grant
- Patent Title: Capacitive sensor for photoacoustic spectroscopy, device and method using such a sensor
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Application No.: US17295137Application Date: 2019-11-20
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Publication No.: US11852580B2Publication Date: 2023-12-26
- Inventor: Aurore Vicet , Kaim Chamassi , Michaël Bahriz
- Applicant: UNIVERSITE DE MONTPELLIER , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Applicant Address: FR Montpellier
- Assignee: UNIVERSITE DE MONTPELLIER,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee: UNIVERSITE DE MONTPELLIER,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee Address: FR Montpellier; FR Paris
- Agency: Greer, Burns & Crain, Ltd
- Priority: FR 71680 2018.11.21
- International Application: PCT/EP2019/081911 2019.11.20
- International Announcement: WO2020/104518A 2020.05.28
- Date entered country: 2021-05-19
- Main IPC: G01N21/17
- IPC: G01N21/17 ; B06B1/02 ; G01N33/00

Abstract:
A sensor for photoacoustic spectroscopy including a support and a mechanical resonator fastened to the support, including at least one sensor element designed to be vibrated by an acoustic wave, and at least one first capacitive electrode mechanically coupled to the sensor element so as to be moved by the sensor element when it is vibrated; and at least one second capacitive electrode forming with the at least one first electrode, a capacitive sensor; the support facing the sensor element, an apertured part formed by one or more through-openings. Also provided is a detection and/or measurement device and method, for photoacoustic spectroscopy, using such a sensor.
Public/Granted literature
- US20220018758A1 CAPACITIVE SENSOR FOR PHOTOACOUSTIC SPECTROSCOPY, DEVICE AND METHOD USING SUCH A SENSOR Public/Granted day:2022-01-20
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